发明申请
- 专利标题： Methods And Systems For Laser Processing
- 专利标题（中）： 激光加工方法与系统
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申请号： US11566586申请日： 2006-12-04
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公开(公告)号： US20070090088A1公开(公告)日： 2007-04-26
- 发明人: Jong-Souk Yeo , Mark Huth , Mehrgan Khavari , Alexey Kabalnov , Craig Gates , Sean Mcclelland
- 申请人： Jong-Souk Yeo , Mark Huth , Mehrgan Khavari , Alexey Kabalnov , Craig Gates , Sean Mcclelland
- 主分类号： G01D15/00
- IPC分类号： G01D15/00 ; C23F1/00 ; H01L21/306 ; H01L21/302
摘要：
The described embodiments relate to slotted substrates. One exemplary method forms a feature into a substrate, at least in part, by directing a laser beam at the substrate. During at least a portion of said directing, the method supplies a conductive material proximate the substrate.
公开/授权文献
- US07938512B2 Methods and systems for laser processing 公开/授权日：2011-05-10
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