发明申请
- 专利标题: Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
- 专利标题(中): 液体排出头的制造方法以及使用该方法得到的排液头
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申请号: US10576249申请日: 2005-06-27
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公开(公告)号: US20070099121A1公开(公告)日: 2007-05-03
- 发明人: Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
- 申请人: Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-190482 20040628
- 国际申请: PCT/JP05/12266 WO 20050627
- 主分类号: G03C5/00
- IPC分类号: G03C5/00
摘要:
According to the present invention, a method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and a inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.
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