A method of manufacturing a display device in which a film deposited on a substrate through openings in a covering layer is easily removed from the covering layer. A master layer having a predetermined pattern of openings is formed on a base substrate exposing portions of the base substrate. A light shielding material is sprayed on the master layer to penetrate inside the openings after the surface of the base substrate exposed through the opening of the master layer has been treated to increase the difference of interface tensions between the master layer and the light shielding material; fabricating a mold provided with the light shielding film by forming a moldable material layer on the base substrate and the master layer and then curing the moldable material layer and the light shielding material; arranging, pressurizing and exposing the mold on an insulation substrate having a photosensitive film formed thereon after separating the mold from the master layer; and developing the photosensitive film after separating the mold from the insulation substrate.