发明申请
- 专利标题: Semiconductor circuit and method of fabricating the same
- 专利标题(中): 半导体电路及其制造方法
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申请号: US11607021申请日: 2006-12-01
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公开(公告)号: US20070099400A1公开(公告)日: 2007-05-03
- 发明人: Kiyoshi Kato , Tomoaki Atsumi , Atsuo Isobe
- 申请人: Kiyoshi Kato , Tomoaki Atsumi , Atsuo Isobe
- 申请人地址: JP Atsugi-shi
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi
- 优先权: JP2002-087208 20020326
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L21/36
摘要:
According to the invention, a plurality of semiconductor devices which are required to have conformance are formed from crystalline semiconductor films having uniform crystallinity on the same line, and a semiconductor circuit in which variation between semiconductor devices is small can be provided, and a semiconductor integrated circuit having high conformance can be provided. The invention is characterized in that, in a part or whole of thin film transistors which configure an analog circuit such as a current mirror circuit, a differential amplifier circuit, or an operational amplifier, in which high conformance is required for semiconductor devices included therein, channel forming regions have crystalline semiconductor films on the same line. High conformance can be expected for an analog circuit which has the crystalline semiconductor films on the same line formed using the invention as the channel forming regions of the thin film transistors. That is, the invention is characterized in that, among the thin film transistors which configures the analog circuit, the channel forming regions of the thin film transistors having at least the same polarity are formed on the same line.
公开/授权文献
- US07704812B2 Semiconductor circuit and method of fabricating the same 公开/授权日:2010-04-27
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