发明申请
- 专利标题: Electrostatic suction type fluid discharge method and device for the same
- 专利标题(中): 静电抽吸式流体排放方法及装置相同
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申请号: US10567657申请日: 2004-08-06
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公开(公告)号: US20070101934A1公开(公告)日: 2007-05-10
- 发明人: Shigeru Nishio , Hironobu Iwashita , Kazunori Yamamoto , Kazuhiro Murata
- 申请人: Shigeru Nishio , Hironobu Iwashita , Kazunori Yamamoto , Kazuhiro Murata
- 申请人地址: JP Osaka 545-8522 JP Chiyoda-ku 100-0005 JP Chiyoda-ku 100-8921
- 专利权人: Sharp Kabushiki Kaisha,Konica Minolta Holdings, Inc.,National Institute of Advanced Industrial Science and Technology
- 当前专利权人: Sharp Kabushiki Kaisha,Konica Minolta Holdings, Inc.,National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址: JP Osaka 545-8522 JP Chiyoda-ku 100-0005 JP Chiyoda-ku 100-8921
- 优先权: JP2003-206941 20030808; JP2003-206944 20030808; JP2003-206946 20030808
- 国际申请: PCT/JP04/11376 WO 20040806
- 主分类号: B05B5/025
- IPC分类号: B05B5/025 ; F23D11/32
摘要:
Voltage applying means applies a pulse voltage between a nozzle and a substrate, the nozzle having a diameter ranging from 0.01 μm to 25 μm, an upper limit voltage (10) of the pulse voltage being equal to or greater than a discharge-inducing minimum voltage (30), that is a voltage required to start discharge of fluid. A lower limit first voltage (20a) is provided immediately before a rise of the pulse voltage, the lower limit first voltage (20a) having a same polarity as that of the upper limit voltage (10), an absolute value of the lower limit first voltage (20a) being set smaller than the discharge-inducing minimum voltage (30). A lower limit second voltage (20b) is provided immediately after a rise of the pulse voltage, the lower limit second voltage (20b) having an opposite polarity as that of the upper limit voltage (10), an absolute value of the lower limit second voltage (20b) being set smaller than the discharge-inducing minimum voltage (30). With this structure, the present invention provides an electrostatic suction type fluid discharge device and an electrostatic suction type fluid discharge method, which simultaneously achieve miniaturization of nozzle, discharge of micro fluid droplet, high accuracy for discharge position, and decrease in drive voltage. The device and method offer superior discharge start/stop characteristic, thus realizing operation at high frequencies. The device is also capable of discharge amount control by pulse time.
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