发明申请
US20070103658A1 Lithographic projection device, method an substrate for manufacturing electronic devices, and obtained electronic device
审中-公开
光刻投影装置，制造电子装置用基板的方法以及获得的电子装置
- 专利标题： Lithographic projection device, method an substrate for manufacturing electronic devices, and obtained electronic device
- 专利标题（中）： 光刻投影装置，制造电子装置用基板的方法以及获得的电子装置
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申请号： US10596510申请日： 2004-12-07
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公开(公告)号： US20070103658A1公开(公告)日： 2007-05-10
- 发明人: Peter Dirksen
- 申请人： Peter Dirksen
- 申请人地址： NL EINDHOVEN
- 专利权人： KONINKLIJKE PHILIPS ELECTRONIC, N.V.
- 当前专利权人： KONINKLIJKE PHILIPS ELECTRONIC, N.V.
- 当前专利权人地址： NL EINDHOVEN
- 优先权： EP03104868.9 20031222
- 国际申请： PCT/IB04/52690 WO 20041207
- 主分类号： G03B27/42
- IPC分类号： G03B27/42
摘要：
The invention proposes a lithographic projection device such as a wafer stepper for forming a pattern on a substrate or wafer, comprising a(n) (actinic) radiation or light source (2), illumination optics (4) for directing light issuing from said light source onto a mask (6) and projection optics (8) for directing diffracted radiation or light from said mask to the substrate/wafer to be imaged, wherein an optical filter (9) is provided downstream of said projection optics and an imageable substrate (7) having an optical filter (9) on the side to be imaged.
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