发明申请
- 专利标题： Multiple fanned laser beam metrology system
- 专利标题（中）： 多扇形激光束计量系统
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申请号： US11407549申请日： 2006-04-19
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公开(公告)号： US20070103699A1公开(公告)日： 2007-05-10
- 发明人: Kirk Kohnen , Peter Sedivec , Douglas Bender , Gregory Becker , John Liu , Richard Guthrie , Ketao Liu , Ray McVey , Mark Lundgren
- 申请人： Kirk Kohnen , Peter Sedivec , Douglas Bender , Gregory Becker , John Liu , Richard Guthrie , Ketao Liu , Ray McVey , Mark Lundgren
- 主分类号： G01B11/14
- IPC分类号： G01B11/14
摘要：
Systems and techniques for laser metrology. Two or more fanned probe beams are scanned relative to a surface including one or more targets. A position detection module receives return beam information from the fanned probe beams, and determines a position of at least a first target of the one or more targets based on the return beam information.
公开/授权文献
- US07787134B2 Multiple fanned laser beam metrology system 公开/授权日：2010-08-31
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