A method for analyzing a layout for a semiconductor integrated circuit, which includes a plurality of physical devices, to generate physical parameter distribution enabling accurate recognition of changes in transistor characteristics caused by systematic variations. The method includes holding systematic variation tables for physical parameters dependent on the layout of the semiconductor integrated circuit among physical parameters related to characteristics of the semiconductor integrated circuit, analyzing a design layout pattern of the semiconductor integrated circuit and selecting tables corresponding to the plurality of physical devices, and generating a physical parameter distribution based on the selected tables.