发明申请
- 专利标题: Surface acoustic wave sensor
- 专利标题(中): 表面声波传感器
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申请号: US10561251申请日: 2004-04-08
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公开(公告)号: US20070107516A1公开(公告)日: 2007-05-17
- 发明人: Koji Fujimoto , Michio Kadota , Yoshiharu Yoshii
- 申请人: Koji Fujimoto , Michio Kadota , Yoshiharu Yoshii
- 优先权: JP2003-191759 20030704
- 国际申请: PCT/JP04/05077 WO 20040408
- 主分类号: G01H13/00
- IPC分类号: G01H13/00
摘要:
A surface acoustic wave sensor for detecting a target substance by measuring the change in frequency due to the mass applied to a reaction membrane placed on a surface acoustic wave element has high sensitivity due to the improvement of the structure surface acoustic wave element. The surface acoustic wave sensor includes an SH-type surface acoustic wave and a rotated Y-cut LiTaO3 substrate having Euler angles (0°, 0° to 18°, 0°±5°) or (0°, 58° to 180°, 0°±5°), electrodes, principally containing Au, for exciting a surface acoustic wave, the electrodes being arranged on the LiTaO3 substrate, and a reaction membrane, bound to a target substance or a binding substance bound to the target substance, covering the electrodes arranged on the LiTaO3 substrate. The interdigital transducers have a normalized thickness of about 0.8% to about 9.5%, the normalized thickness being determined by normalizing the thickness of the interdigital transducers by the wavelength of the surface acoustic wave.
公开/授权文献
- US07816837B2 Surface acoustic wave sensor 公开/授权日:2010-10-19
信息查询
IPC分类:
G | 物理 |
G01 | 测量;测试 |
G01H | 机械振动或超声波、声波或次声波的测量 |
G01H13/00 | 测量谐振(共振)频率 |