发明申请
- 专利标题: Corrosion-resistant member
- 专利标题(中): 耐腐蚀构件
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申请号: US11516318申请日: 2006-09-06
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公开(公告)号: US20070107842A1公开(公告)日: 2007-05-17
- 发明人: Takeshi Ishimatsu , Akira Yamaguchi
- 申请人: Takeshi Ishimatsu , Akira Yamaguchi
- 优先权: JP2005-257209 20050906; JP2006-137742 20060517
- 主分类号: H01L21/306
- IPC分类号: H01L21/306 ; C23F1/00
摘要:
To provide a material for devices that require good corrosion resistance and a property of less liquid remaining, such as jigs to load an article to be treated in a wet process and spray chambers for ICP analysis. At least the surface of the devices that require good corrosion resistance and a property of no liquid remaining on the surface comprises glassy carbon with a surface roughness (Ra) of 10 μm or less. When the device is a jig to load an article to be treated in a wet process, the purity of the surface to be in contact with liquid is 50 ppm or less in terms of ash content and the surface roughness (Ra) is 0.1 μm or less. When the device is a spray chamber for ICP analysis, Ra is 0.1-10 μm and the purity of the surface to be in contact with liquid is 50 ppm or less.
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