发明申请
- 专利标题： Wafer container and door with vibration dampening latching mechanism
- 专利标题（中）： 晶圆容器和门具有减震锁定机构
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申请号： US11651779申请日： 2007-01-10
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公开(公告)号： US20070108095A1公开(公告)日： 2007-05-17
- 发明人: John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
- 申请人： John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
- 专利权人： Entegris, Inc.
- 当前专利权人： Entegris, Inc.
- 主分类号： B65D85/00
- IPC分类号： B65D85/00
摘要：
A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
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