Invention Application
- Patent Title: NOVEL METHOD FOR FOUR DIRECTION LOW CAPACITANCE ESD PROTECTION
- Patent Title (中): 四方向低电容ESD保护的新方法
-
Application No.: US11622574Application Date: 2007-01-12
-
Publication No.: US20070108527A1Publication Date: 2007-05-17
- Inventor: Jian-Hsing Lee , Shui Chen
- Applicant: Jian-Hsing Lee , Shui Chen
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L23/62
- IPC: H01L23/62

Abstract:
The invention describes a structure and a process for providing ESD semiconductor protection with reduced input capacitance. The structure consists of heavily doped P+ guard rings surrounding the I/O ESD protection device and the Vcc to Bss protection device. In addition, there is a heavily doped N+ guard ring surrounding the I/O protection device its P+ guard ring. The guard rings enhance structure diode elements providing enhanced ESD energy discharge path capability enabling the elimination of a specific conventional Vss to I/O pad ESD protection device. This reduces the capacitance seen by the I/O circuit while still providing adequate ESD protection for the active circuit devices.
Public/Granted literature
- US07485930B2 Method for four direction low capacitance ESD protection Public/Granted day:2009-02-03
Information query
IPC分类: