发明申请
- 专利标题: Lithographic apparatus and motor
- 专利标题(中): 光刻设备和电机
-
申请号: US11273634申请日: 2005-11-15
-
公开(公告)号: US20070108848A1公开(公告)日: 2007-05-17
- 发明人: Sven Hol , Angelo De Klerk , Erik Loopstra , Fransicus Jacobs , Mark Scholten , Arjan Bakker
- 申请人: Sven Hol , Angelo De Klerk , Erik Loopstra , Fransicus Jacobs , Mark Scholten , Arjan Bakker
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: H02K41/00
- IPC分类号: H02K41/00 ; G03B27/42
摘要:
A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.
公开/授权文献
- US07459808B2 Lithographic apparatus and motor 公开/授权日:2008-12-02
信息查询