- 专利标题: Refractive projection objective for immersion lithography
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申请号: US11649274申请日: 2007-01-04
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公开(公告)号: US20070109659A1公开(公告)日: 2007-05-17
- 发明人: Hans-Juergen Rostalski , Aurelian Dodoc , Alexander Epple , Helmut Beierl
- 申请人: Hans-Juergen Rostalski , Aurelian Dodoc , Alexander Epple , Helmut Beierl
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102004051730.4 20041022
- 主分类号: G02B3/00
- IPC分类号: G02B3/00
摘要:
A purely refractive projection objective suitable for immersion microlithography is designed as a single-waist system with five lens groups, in the case of which a first lens group with negative refractive power, a second lens group with positive refractive power, a third lens group with negative refractive power, a fourth lens group with positive refractive power and a fifth lens group with positive refractive power are provided. A constriction site of narrowest constriction of the beam bundle lies in the region of the waist. A waist distance AT exists between the object plane and the constriction site X. The condition AT/L≦0.4 holds for a distance ratio AT/L between the waist distance AT and an object-image distance L of the projection objective. Embodiments of inventive projection objectives reach very high numerical apertures NA>1.1 in conjunction with a large image field and are distinguished by a compact overall size and good correction of the lateral chromatic aberration.
公开/授权文献
- US07408716B2 Refractive projection objective for immersion lithography 公开/授权日:2008-08-05
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