- 专利标题: Composite gate structure in an integrated circuit
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申请号: US11648964申请日: 2007-01-03
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公开(公告)号: US20070111425A1公开(公告)日: 2007-05-17
- 发明人: I-Lu Wu , Kuang-Hsin Chen , Liang-Kai Han
- 申请人: I-Lu Wu , Kuang-Hsin Chen , Liang-Kai Han
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
An integrated circuit having composite gate structures and a method of forming the same are provided. The integrated circuit includes a first MOS device, a second MOS device and a third MOS device. The gate stack of the first MOS device includes a high-k gate dielectric and a first metal gate on the high-k gate dielectric. The gate stack of the second MOS device includes a second metal gate on a high-k gate dielectric. The first metal gate and the second metal gate have different work functions. The gate stack of the third MOS device includes a silicon gate over a gate dielectric. The silicon gate is preferably formed over the gate stacks of the first MOS device and the second MOS device.
公开/授权文献
- US07297587B2 Composite gate structure in an integrated circuit 公开/授权日:2007-11-20
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