发明申请
US20070111484A1 Dicing sheet frame 审中-公开
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Dicing sheet frame
摘要:
A dicing sheet frame, which is used when a semiconductor wafer adhered to a dicing sheet is cut into chips, includes a plurality of frame parts and a connecting device. The plurality of frame parts supports the dicing sheet. The connecting device connects the plurality of frame parts such that the plurality of frame parts has an annular shape.
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