发明申请
- 专利标题: Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
- 专利标题(中): 形成含有抗静电气相润滑剂的微机械系统的方法
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申请号: US11315920申请日: 2005-12-22
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公开(公告)号: US20070115530A1公开(公告)日: 2007-05-24
- 发明人: Dongmin Chen , Fulin Xiong
- 申请人: Dongmin Chen , Fulin Xiong
- 专利权人: Miradia Inc.
- 当前专利权人: Miradia Inc.
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
Embodiments of the present invention generally relate to a process of forming a device that has an improved usable lifetime due to the addition of a gas-phase lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.