发明申请
- 专利标题: CAPACITOR MICROPHONE AND DIAPHRAGM THEREFOR
- 专利标题(中): 电容麦克风和其他胶片
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申请号: US11534915申请日: 2006-09-25
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公开(公告)号: US20070121972A1公开(公告)日: 2007-05-31
- 发明人: Yukitoshi Suzuki , Seiji Hirade , Tamito Suzuki , Shingo Sakakibara , Takahiro Terada
- 申请人: Yukitoshi Suzuki , Seiji Hirade , Tamito Suzuki , Shingo Sakakibara , Takahiro Terada
- 申请人地址: JP Hamamatsu-Shi
- 专利权人: Yamaha Corporation
- 当前专利权人: Yamaha Corporation
- 当前专利权人地址: JP Hamamatsu-Shi
- 优先权: JP2005-277377 20050926; JP2006-028439 20060206; JP2006-089680 20060329; JP2006-094414 20060330; JP2006-224978 20060822
- 主分类号: H04R25/00
- IPC分类号: H04R25/00
摘要:
In a capacitor microphone, a diaphragm is positioned opposite to a fixed electrode for covering inner holes of a ring-shaped support, wherein when the diaphragm is deflected to approach the fixed electrode due to electrostatic attraction upon application of a bias voltage, internal stress that occurs on the diaphragm is canceled by compressive stress that is applied to the diaphragm in advance. The diaphragm is formed using a multilayered structure including a first thin film and a second thin film whose internal stress differs from the internal stress of the first thin film, thus adjusting the total internal stress thereof. The diaphragm can be formed in such a way that a center layer having a single-layered structure is sandwiched between first and second coating layers having controlled residual tensions and resistance against hydrofluoric acid.