发明申请
- 专利标题： METHOD OF CREATING A FILE FOR A PATTERNING MASK
- 专利标题（中）： 创建文件的方法
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申请号： US11564117申请日： 2006-11-28
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公开(公告)号： US20070124327A1公开(公告)日： 2007-05-31
- 发明人: Jung Soo Park
- 申请人： Jung Soo Park
- 优先权： KR10-2005-0115439 20051130
- 主分类号： G06F7/00
- IPC分类号： G06F7/00
摘要：
Disclosed is a method which may convert files containing information about a mask to create a file for patterning a mask. A plurality of files may be processed at the same time regardless of the number of files containing mask information. Final fracture files may be created from a plurality of mask information files at the same time, which may reduce processing time.
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