发明申请
- 专利标题: Ink jet head manufacturing method and ink jet head manufactured by the manufacturing method
- 专利标题(中): 喷墨头制造方法和通过制造方法制造的喷墨头
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申请号: US10576247申请日: 2005-06-27
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公开(公告)号: US20070132811A1公开(公告)日: 2007-06-14
- 发明人: Akihiko Okano , Shoji Shiba , Hiroe Ishikura
- 申请人: Akihiko Okano , Shoji Shiba , Hiroe Ishikura
- 优先权: JP2004-190480 20040628
- 国际申请: PCT/JP05/12268 WO 20050627
- 主分类号: G03C5/00
- IPC分类号: G03C5/00 ; B41J2/04
摘要:
A method of manufacturing an ink jet head which includes a discharge port for discharging an ink droplet, an ink flow path communicated with the discharge port, and an energy generating element for discharging the ink droplet from the discharge port, the method for manufacturing an ink jet head includes a process of forming a photodegradable positive type resist layer on a substrate having the energy generating element, a process of forming a structure which becomes the ink flow path by exposing and developing the photodegradable positive type resist layer, a process of coating the substrate having the structure which becomes the ink flow path with a negative type resist layer, a process of forming the ink discharge port in the negative type resist layer, and a process of forming the ink flow path communicated with the discharge port by removing the structure which becomes the ink flow path, wherein the photodegradable positive type resist layer includes an acrylic copolymer composition, the acrylic copolymer composition containing at least a unit obtained from (meta)acrylic ester as a main content, the acrylic copolymer composition further containing a unit obtained from (meta)acrylic acid, the acrylic copolymer composition contains the (meta)acrylic acid unit at a proportion of 5 to 30 weight %, and weight average molecular weight of the acrylic copolymer ranges from 50000 to 300000.
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