发明申请
- 专利标题: Method of manufacturing vertical gallium nitride based light emitting diode
- 专利标题(中): 制造垂直氮化镓基发光二极管的方法
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申请号: US11634106申请日: 2006-12-06
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公开(公告)号: US20070134834A1公开(公告)日: 2007-06-14
- 发明人: Jae Lee , Jung Lee , Hyun Cho , Dae Kim , Jae Ro
- 申请人: Jae Lee , Jung Lee , Hyun Cho , Dae Kim , Jae Ro
- 专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 优先权: KR10-2005-0120599 20051209
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A method of manufacturing a vertical GaN-based LED includes forming a nitride-based buffer layer on a silicon substrate; sequentially forming a p-type GaN layer, an active layer, and an n-type GaN layer on the nitride-based buffer layer; forming an n-electrode on the n-type GaN layer; forming a plating seed layer on the n-electrode; forming a structure supporting layer on the plating seed layer; removing the silicon substrate through wet etching and forming roughness on the surface of the p-type GaN layer through over-etching; and forming a p-electrode on the p-type GaN layer having the roughness formed.
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