发明申请
- 专利标题: Layout method of power line for semiconductor integrated circuit and semiconductor integrated circuit manufactured by the layout method
- 专利标题(中): 半导体集成电路电源线布局方法和半导体集成电路布局方法
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申请号: US11523212申请日: 2006-09-19
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公开(公告)号: US20070134852A1公开(公告)日: 2007-06-14
- 发明人: Sang Jin Byun , Hyun Kyu Yu
- 申请人: Sang Jin Byun , Hyun Kyu Yu
- 优先权: KR10-2005-0120038 20051208; KR10-2006-0044931 20060519
- 主分类号: H01L21/82
- IPC分类号: H01L21/82
摘要:
Provided are a layout method of a power line for a semiconductor integrated circuit and a semiconductor integrated circuit manufactured by the layout method. The layout method includes the steps of: forming a decoupling capacitor on a substrate; laying out a first metal layer, connected to the decoupling capacitor through a contact, above a region where the decoupling capacitor is formed so as to cover the decoupling capacitor; and laying out a second metal layer above a region where the first metal layer is formed. Therefore, the metal layers and the decoupling capacitor are laid out in the same region so that a chip area can be prevented from being additionally consumed at the time of laying out the decoupling capacitor, and degradation which may occur due to connection line resistance from the power lines to the decoupling capacitors can be prevented.
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