Invention Application
- Patent Title: MULTI-SCALE CANTILEVER STRUCTURES HAVING NANO SIZED HOLES AND METHOD OF PREPARING THE SAME
- Patent Title (中): 具有纳米尺寸的多个锥形结构及其制备方法
-
Application No.: US11553283Application Date: 2006-10-26
-
Publication No.: US20070137308A1Publication Date: 2007-06-21
- Inventor: Jung LEE , Pyung LEE , Kun LEE , Nayoung SHIN
- Applicant: Jung LEE , Pyung LEE , Kun LEE , Nayoung SHIN
- Applicant Address: KR Pohang-city KR Pohang-city
- Assignee: POSTECH FOUNDATION,POSTECH ACADEMY-INDUSTRY FOUNDATION
- Current Assignee: POSTECH FOUNDATION,POSTECH ACADEMY-INDUSTRY FOUNDATION
- Current Assignee Address: KR Pohang-city KR Pohang-city
- Priority: KR10-2005-0101748 20051027
- Main IPC: G01B7/16
- IPC: G01B7/16

Abstract:
Provided are a multi-scale cantilever structure having nano-sized holes prepared by anodic oxidation and a method of preparing the same. The multi-scale cantilever structure is prepared using anodic oxidation and electro-polishing so that a manufacturing process is simple and a manufacturing cost is inexpensive. In addition, the multi-scale cantilever structure has a porous structure having a plurality of nano-sized holes inside thereof, and thus a surface area of the cantilever structure can be maximized. Therefore, when the cantilever structure is used in a sensor, the sensor can have improved sensitivity and selectivity.
Public/Granted literature
- US07432571B2 Multi-scale cantilever structures having nano sized holes and method of preparing the same Public/Granted day:2008-10-07
Information query