发明申请
- 专利标题： Chamber with low electron stimulated desorption
- 专利标题（中）： 具有低电子刺激解吸的室
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申请号： US10571519申请日： 2004-09-09
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公开(公告)号： US20070138404A1公开(公告)日： 2007-06-21
- 发明人: Juergen Frosien , Thomas Jasinski , Dieter Winkler
- 申请人： Juergen Frosien , Thomas Jasinski , Dieter Winkler
- 优先权： EP03020774.0 20030912
- 国际申请： PCT/EP04/10078 WO 20040909
- 主分类号： G01K1/08
- IPC分类号： G01K1/08
摘要：
The present invention provides a charged particle emission component (100) for providing a charged particle beam (17) to a chamber of a charged particle beam column. The device comprises a gun chamber for housing the charged particle emission component; an emitter (16) for emitting a beam of charged particles; at least one beam shaping element (109; 18; 108; 402); and a residual gas diffusion barrier (106; 206) directly subsequent the emitter.
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