Invention Application
US20070141330A1 Method of producing a semiconductor device, and wafer-processing tape 有权
半导体器件的制造方法以及晶片加工用带

Method of producing a semiconductor device, and wafer-processing tape
Abstract:
A wafer-processing tape, having a removable adhesive layer(2), and an adhesive layer (3), formed on a substrate film(1), wherein the tape is used in a process involving the steps of: grinding a back face of a wafer circuit substrate (5) having convex-type metal electrodes (4), and dicing the wafer circuit substrate into chips, in a state that the tape is adhered to the wafer circuit substrate; and picking up the chips, in which the chips are picked up in a state that the adhesive layer (3) is peeled from the substrate film (1) but is bonded to the individual chip.
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