发明申请
- 专利标题： Method for making crystalline composition
- 专利标题（中）： 制造结晶组合物的方法
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申请号： US11313528申请日： 2005-12-20
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公开(公告)号： US20070141819A1公开(公告)日： 2007-06-21
- 发明人: Dong-Sil Park , Mark D'Evelyn , Myles Peterson , John Leman , Joell Hibshman , Fred Sharifi
- 申请人： Dong-Sil Park , Mark D'Evelyn , Myles Peterson , John Leman , Joell Hibshman , Fred Sharifi
- 申请人地址： US NY Schenectady
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 当前专利权人地址： US NY Schenectady
- 主分类号： H01L21/20
- IPC分类号： H01L21/20
摘要：
A method of making a metal nitride is provided. The method may include introducing a metal in a chamber. A nitrogen-containing material may be flowed into the chamber. Further, a hydrogen halide may be introduced. The nitrogen-containing material may react with the metal in the chamber to form the metal nitride.
公开/授权文献
- US07935382B2 Method for making crystalline composition 公开/授权日：2011-05-03
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