发明申请
US20070148603A1 Method for forming pattern and method for fabricating LCD device using the same 有权
用于形成图案的方法和使用其制造LCD装置的方法

  • 专利标题: Method for forming pattern and method for fabricating LCD device using the same
  • 专利标题(中): 用于形成图案的方法和使用其制造LCD装置的方法
  • 申请号: US11640985
    申请日: 2006-12-19
  • 公开(公告)号: US20070148603A1
    公开(公告)日: 2007-06-28
  • 发明人: Hye LeeJae Oh
  • 申请人: Hye LeeJae Oh
  • 优先权: KRP2005-130494 20051227
  • 主分类号: G03F7/26
  • IPC分类号: G03F7/26
Method for forming pattern and method for fabricating LCD device using the same
摘要:
A method for forming a pattern and a method for fabricating an LCD device using the same is disclosed, wherein a photoresist layer is removed from a substrate without using a photoresist stripper, so that the pattern is formed with a low fabrication costs. The method comprising sequentially forming a pattern material layer, a transformed material layer and a photoresist layer on a substrate; patterning the photoresist layer by exposure and development using a mask; selectively etching the transformed material layer and the pattern material layer by using the patterned photoresist layer as a mask; and removing the transformed material layer and the patterned photoresist layer in a lift-off method by applying light.
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