发明申请
- 专利标题: Semiconductor device and fabrication method thereof
- 专利标题(中): 半导体器件及其制造方法
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申请号: US11324334申请日: 2006-01-04
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公开(公告)号: US20070152306A1公开(公告)日: 2007-07-05
- 发明人: Chien-Hsueh Shih , Shau-Lin Shue , Mong-Song Liang , Chao-Hsien Peng
- 申请人: Chien-Hsueh Shih , Shau-Lin Shue , Mong-Song Liang , Chao-Hsien Peng
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 主分类号: H01L23/58
- IPC分类号: H01L23/58 ; H01L21/4763
摘要:
A semiconductor device and fabrication method thereof. The semiconductor device comprises a substrate, an electroactive organic layer with conformal step coverage and uniform thickness, and a metal layer. The substrate is a conductive substrate or a nonconductive substrate with a conductive layer formed thereon. The electroactive organic layer and the metal layer are formed sequentially on the conductive substrate or the conductive layer, wherein the electroactive organic layer comprises metal atoms and serves as a seed layer, resulting in the metal layer formed in-situ.
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