Invention Application
- Patent Title: Out-of-Plane Electrostatic Actuator
- Patent Title (中): 平面静电执行机构
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Application No.: US11275486Application Date: 2006-01-09
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Publication No.: US20070158767A1Publication Date: 2007-07-12
- Inventor: Michael Sinclair
- Applicant: Michael Sinclair
- Applicant Address: US WA Redmond
- Assignee: Microsoft Corporation
- Current Assignee: Microsoft Corporation
- Current Assignee Address: US WA Redmond
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
A micro-electromechanical device includes a semiconductor substrate and an arm coupled to the substrate. The arm is pivotable out-of-plane relative to the substrate and at least a portion of the arm is deformable. The deformable portion of the arm deforms as the arm pivots relative to the substrate.
Public/Granted literature
- US07482664B2 Out-of-plane electrostatic actuator Public/Granted day:2009-01-27
Information query
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