发明申请
US20070165941A1 Surface defect inspector and method of inspecting surface defect
有权
表面缺陷检查员和检查表面缺陷的方法
- 专利标题: Surface defect inspector and method of inspecting surface defect
- 专利标题(中): 表面缺陷检查员和检查表面缺陷的方法
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申请号: US11655212申请日: 2007-01-19
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公开(公告)号: US20070165941A1公开(公告)日: 2007-07-19
- 发明人: Hiroaki Shinohara , Minoru Matsuura
- 申请人: Hiroaki Shinohara , Minoru Matsuura
- 申请人地址: JP Minato-ku
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Minato-ku
- 优先权: JP2006-010860 20060119
- 主分类号: G06K9/00
- IPC分类号: G06K9/00
摘要:
Wrinkles on polymer film as surface defect are inspected. The film is transported on an inspecting surface having a color for absorbing light. A dot pattern having dots on a transparent test chart sheet, facing the film, is photographed by image pickup upon reflection of the dot pattern on the film positioned on the inspecting surface. A length of the dots being photographed is measured according to image data, to obtain length information of 1-5. A length data table of the dots is created by arranging the length information of 1-5 at locations of the dots. Occurrence of a wrinkle is determined at one of the locations if a difference between the dots occurs in the length information of 1-5 in the length data table. To a rear of the test chart sheet, inspecting light is applied, passes through, and becomes incident upon the film.