发明申请
US20070166933A1 Methods of Forming Field Effect Transistors and Capacitor-Free Dynamic Random Access Memory Cells
失效
形成场效应晶体管和无电容动态随机存取存储单元的方法
- 专利标题: Methods of Forming Field Effect Transistors and Capacitor-Free Dynamic Random Access Memory Cells
- 专利标题(中): 形成场效应晶体管和无电容动态随机存取存储单元的方法
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申请号: US11622584申请日: 2007-01-12
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公开(公告)号: US20070166933A1公开(公告)日: 2007-07-19
- 发明人: Ki-whan Song , Chang-kyun Kim
- 申请人: Ki-whan Song , Chang-kyun Kim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR2006-4439 20060116
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Methods of forming capacitor-free DRAM cells include forming a field effect transistor by forming a first semiconductor wafer having a channel region protrusion extending therefrom and surrounding the channel region protrusion by an electrical isolation region. A portion of a backside of the first semiconductor wafer is then removed to define a semiconductor layer having a primary surface extending opposite the channel region protrusion and the electrical isolation region. A gate electrode is formed on the primary surface. The gate electrode extends opposite the channel region protrusion. The source and drain regions are formed in the semiconductor layer, on opposite sides of the gate electrode.
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