发明申请
- 专利标题: Method for manufacturing printed circuit board with thin film capacitor embedded therein
- 专利标题(中): 制造具有薄膜电容器的印刷电路板的制造方法
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申请号: US11700864申请日: 2007-02-01
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公开(公告)号: US20070178412A1公开(公告)日: 2007-08-02
- 发明人: Hyung Mi Jung , Yul Kyo Chung , Hyung Dong Kang
- 申请人: Hyung Mi Jung , Yul Kyo Chung , Hyung Dong Kang
- 专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 优先权: KR10-2006-0009830 20060201
- 主分类号: G03C5/00
- IPC分类号: G03C5/00
摘要:
In a method for manufacturing a printed circuit board with a thin film capacitor embedded therein, a conductive metal is sputtered via a first mask to form a lower electrode. A dielectric material is sputtered via a second mask to form a dielectric layer. The conductive metal is sputtered via a third mask to form an upper electrode. An insulating layer is stacked on a stack body with the upper electrode formed therein and via holes are perforated from a top surface of the insulating layer to a top surface of the lower electrode and from the top surface of the insulating layer to a top surface of the upper electrode formed on the substrate. Also, the stack body with the via holes formed therein is electrolytically and electrolessly plated.
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