发明申请
- 专利标题: RECESSED GATE FOR A CMOS IMAGE SENSOR
- 专利标题(中): CMOS图像传感器的接收门
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申请号: US11735223申请日: 2007-04-13
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公开(公告)号: US20070184614A1公开(公告)日: 2007-08-09
- 发明人: James Adkisson , John Ellis-Monaghan , Mark Jaffe , Jerome Lasky
- 申请人: James Adkisson , John Ellis-Monaghan , Mark Jaffe , Jerome Lasky
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A novel CMOS image sensor cell structure and method of manufacture. The imaging sensor comprises a substrate having an upper surface, a gate comprising a dielectric layer formed on the substrate and a gate conductor formed on the gate dielectric layer, a collection well layer of a first conductivity type formed below a surface of the substrate adjacent a first side of the gate conductor, a pinning layer of a second conductivity type formed atop the collection well at the substrate surface, and a diffusion region of a first conductivity type formed adjacent a second side of the gate conductor, the gate conductor forming a channel region between the collection well layer and the diffusion region. A portion of the bottom of the gate conductor is recessed below the surface of the substrate. Preferably, a portion of the gate conductor is recessed at or below a bottom surface of the pinning layer to a depth such that the collection well intersects the channel region thereby eliminating any potential barrier interference caused by the pinning layer.
公开/授权文献
- US07572701B2 Recessed gate for a CMOS image sensor 公开/授权日:2009-08-11
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