Invention Application
- Patent Title: Capacity detection type sensor element
- Patent Title (中): 容量检测型传感器元件
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Application No.: US10589352Application Date: 2005-02-14
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Publication No.: US20070193358A1Publication Date: 2007-08-23
- Inventor: Kenichi Kagawa , Masami Yakabe , Shinichi Saeki , Takahisa Ohtsuji
- Applicant: Kenichi Kagawa , Masami Yakabe , Shinichi Saeki , Takahisa Ohtsuji
- Priority: JP2004-037339 20040213
- International Application: PCT/JP05/02172 WO 20050214
- Main IPC: G01L9/12
- IPC: G01L9/12

Abstract:
A capacity detection type sensor element includes a rectangular vibrating plate, a flat back electrode which are provided opposedly with each other, and fixing portions which are provided adjoining to the vibrating plate, and has a predetermined length A of edge at a side adjoining to the vibrating plate. The back electrode is held by the fixing portions in a state that space is provided between the back electrode and the vibrating plate. Outer edges of the back electrode which are not held by the adjoining fixing portions, are straight lines and the straight lines define an octagonal shape as a whole.
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