- 专利标题: Non-volatile semiconductor memory device
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申请号: US11783648申请日: 2007-04-11
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公开(公告)号: US20070194370A1公开(公告)日: 2007-08-23
- 发明人: Yoshihiro Ikeda , Hiroshi Ishida
- 申请人: Yoshihiro Ikeda , Hiroshi Ishida
- 申请人地址: JP Tokyo
- 专利权人: RENESAS TECHNOLOGY CORP.
- 当前专利权人: RENESAS TECHNOLOGY CORP.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-314069 20041028
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A non-volatile semiconductor memory device includes a semiconductor substrate, an insulating film formed on the semiconductor substrate, a plurality of memory cells formed on the semiconductor substrate, a plurality of first assist gates extending toward the memory cell, a connection portion connecting end portions of the first assist gates, a second assist gate extending toward the memory cell, a first select transistor controlling whether to apply a voltage to an area under the first assist gate, a second select transistor controlling whether to apply a voltage to an area under the second assist gate, and an impurity region. The insulating film formed under an intersection area of the connection portion and the impurity region has a thickness larger than the insulating film formed under the first and second assist gates. A non-volatile semiconductor memory device capable of ensuring a writing speed as well as reliability can thus be obtained.
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