发明申请
- 专利标题: Non-contact support platforms for distance adjustment
- 专利标题(中): 用于距离调整的非接触式支撑平台
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申请号: US11578162申请日: 2005-04-13
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公开(公告)号: US20070195653A1公开(公告)日: 2007-08-23
- 发明人: Yuval Yassour , Arie Harnik , Hilel Richman
- 申请人: Yuval Yassour , Arie Harnik , Hilel Richman
- 国际申请: PCT/IL05/00390 WO 20050413
- 主分类号: G11B11/00
- IPC分类号: G11B11/00
摘要:
An apparatus for supporting a stationary or moving substantially flat object without physical contact on an fluid-cushion. The object floats on a fluid cushion gap, the apparatus aimed for globally or locally adjusting the gap. The apparatus comprising: a first platform for supporting the object without contact, the platform having a substantially flat active surface comprised of one or more sectors, each sector comprising at least one of a plurality of basic cells, each basic cell having at least one of a plurality of pressure outlets fluidically connected through a pressure flow restrictors to a higher-pressure manifold associated with the sector in which the basic cell lies, the higher-pressure manifold is fluidically connected through main supply pipeline to pressurized fluid supply and at least one of a plurality of fluid-evacuation channels fluidically connected to a lower-pressure manifold associated with the sector in which the basic cell lies having main evacuation pipeline; wherein the flow restrictor characteristically exhibiting fluidic return spring behavior; and wherein at least one pressure control valve is interposed with at least one of the two main pipelines of at least one sector for controlling pressure levels of at least one of the two manifolds of that sector.
公开/授权文献
- US07604439B2 Non-contact support platforms for distance adjustment 公开/授权日:2009-10-20
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