发明申请
- 专利标题： Laser beam micro-smoothing
- 专利标题（中）： 激光束微平滑
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申请号： US11709041申请日： 2007-02-21
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公开(公告)号： US20070196967A1公开(公告)日： 2007-08-23
- 发明人: Holger Graefe , Uwe Wiedenbruch , Thomas Schroeder , Frank Simon , Elko Bergmann
- 申请人： Holger Graefe , Uwe Wiedenbruch , Thomas Schroeder , Frank Simon , Elko Bergmann
- 主分类号： H01L21/84
- IPC分类号： H01L21/84
摘要：
The present invention provides laser beam micro-smoothing for laser annealing systems. Laser beam micro-smoothing comprises shifting a laser beam in the direction perpendicular to the scanning direction (y) of a laser annealing system, while holding the laser beam fixed in the direction of scanning (x). The shifting may be accomplished, for example, with a pair of micro-smoothing mirrors. The shifting smoothes out small-scale inhomogeneities in the profile of the laser beam and prevents microscopic stripes associated with prior art laser annealing systems. Because the shifting occurs only in the direction perpendicular to the scanning direction (y), the laser annealing process in not adversely affected.
公开/授权文献
- US07723169B2 Laser beam micro-smoothing 公开/授权日：2010-05-25
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