发明申请
- 专利标题: Semiconductor Device and Magneto-Resistive Sensor Integration
- 专利标题(中): 半导体器件和磁电阻传感器集成
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申请号: US11742335申请日: 2007-04-30
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公开(公告)号: US20070200565A1公开(公告)日: 2007-08-30
- 发明人: William Witcraft , Lonny Berg , Mark Amundson
- 申请人: William Witcraft , Lonny Berg , Mark Amundson
- 申请人地址: US NJ Morristown
- 专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人地址: US NJ Morristown
- 主分类号: G01R33/02
- IPC分类号: G01R33/02
摘要:
A magnetic-sensing apparatus and method of making and using thereof is provided. The sensing apparatus may be fabricated from semiconductor circuitry and a magneto-resistive sensor. A dielectric may be disposed between the semiconductor circuitry and the magneto-resistive sensor. In one embodiment, the semiconductor circuitry and magneto-resistive sensor are formed into a single package or, alternatively, monolithically formed into a single chip. In another embodiment, some of the semiconductor circuitry may be monolithically formed on a first chip with the magneto-resistive sensor, while other portions of the semiconductor circuitry may be formed on a second chip. As such, the first and second chips may be placed in close proximity and electrically connected together or alternatively have no intentional electrical interaction. Exemplary semiconductor devices that might be implemented include, without limitation, capacitors, inductors, operational amplifiers, set/reset circuitry for the MR sensors, accelerometers, pressure sensors, position sensing circuitry, compassing circuitry, etc.
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