发明申请
- 专利标题： Probe and method of manufacturing a probe
- 专利标题（中）： 探头和制造探针的方法
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申请号： US11482848申请日： 2006-07-10
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公开(公告)号： US20070200582A1公开(公告)日： 2007-08-30
- 发明人: Toshihiro Ishizuka
- 申请人： Toshihiro Ishizuka
- 申请人地址： JP Kawasaki
- 专利权人： FUJITSU LIMITED
- 当前专利权人： FUJITSU LIMITED
- 当前专利权人地址： JP Kawasaki
- 优先权： JPJP2006-038066 20060215
- 主分类号： G01R31/02
- IPC分类号： G01R31/02
摘要：
A probe 10 to be used when inspecting characteristics of an object of inspection includes: a bar-shaped base member 3 forming a main body; a nickel plating layer 4 constituting a ground layer and a gold plating layer 5 constituting an outermost layer formed on a surface of the base member 3; and a plurality of square-pyramidal 1 protrusions formed in a lattice-like fashion at one end of the base member 3 and brought into contact with the object of inspection.
公开/授权文献
- US07612572B2 Probe and method of manufacturing a probe 公开/授权日：2009-11-03
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