发明申请
- 专利标题: Memory device and method of manufacturing the same
- 专利标题(中): 存储器件及其制造方法
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申请号: US11652583申请日: 2007-01-12
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公开(公告)号: US20070202648A1公开(公告)日: 2007-08-30
- 发明人: Seong Jae Choi , Kwang Soo Seol , Jae-Young Choi , Dong-Kee Yi , Seon Mi Yoon
- 申请人: Seong Jae Choi , Kwang Soo Seol , Jae-Young Choi , Dong-Kee Yi , Seon Mi Yoon
- 专利权人: Samsung Electronics Co. Ltd.
- 当前专利权人: Samsung Electronics Co. Ltd.
- 优先权: KR10-2006-0019302 20060228; KR10-2006-0126409 20061212
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Provided is a memory device comprising a substrate, a source region, and a drain region that may be formed in the substrate and spaced apart from each other, a memory cell that may be formed on the surface of the substrate, connecting the source region and the drain region, and including a plurality of nanocrystals, wherein the memory cell comprises a first tunneling oxide layer formed on the substrate, and a control oxide layer including a plurality of nanocrystals formed on the tunneling oxide layer and a control gate formed on the memory cell. The memory device may include a polyelectrolyte film which enables a uniform arrangement of nanocrystals. The device characteristics may be controlled and a memory device with improved device characteristics may be provided.
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