Invention Application
- Patent Title: TIME RESOLVED NON-INVASIVE DIAGNOSTICS SYSTEM
- Patent Title (中): 时间决定的非入侵诊断系统
-
Application No.: US11745732Application Date: 2007-05-08
-
Publication No.: US20070206846A1Publication Date: 2007-09-06
- Inventor: Daniel COTTON , Nader PAKDAMAN , James VICKERS , Thomas WONG
- Applicant: Daniel COTTON , Nader PAKDAMAN , James VICKERS , Thomas WONG
- Applicant Address: US CA Milpitas
- Assignee: CREDENCE SYSTEMS CORPORATION
- Current Assignee: CREDENCE SYSTEMS CORPORATION
- Current Assignee Address: US CA Milpitas
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
A system for probe-less non-invasive detection of electrical signals from integrated circuit devices is disclosed. The system includes an illumination source, collection optics, imaging optics, and a photon sensor. In a navigation mode, the light source is activated and the imaging optics is used to identify the target area on the chip and appropriately position the collection optics. Once the collection optics is appropriately positioned, the light source is deactivated and the photon sensor is used to detect photons emitted from the chip. No mention of cooling (active device measurement capability) and advanced optics to detect the features (SIL).
Public/Granted literature
- US07466852B2 Time resolved non-invasive diagnostics system Public/Granted day:2008-12-16
Information query