发明申请
US20070207261A1 DEVICE AND METHOD FOR VAPORIZING TEMPERATURE SENSITIVE MATERIALS
有权
用于蒸发温度敏感材料的装置和方法
- 专利标题: DEVICE AND METHOD FOR VAPORIZING TEMPERATURE SENSITIVE MATERIALS
- 专利标题(中): 用于蒸发温度敏感材料的装置和方法
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申请号: US11745504申请日: 2007-05-08
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公开(公告)号: US20070207261A1公开(公告)日: 2007-09-06
- 发明人: Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
- 申请人: Michael Long , Randolph Brost , Jeremy Grace , Dennis Freeman , Neil Redden , Bruce Koppe
- 主分类号: C23C14/54
- IPC分类号: C23C14/54 ; B05C11/00
摘要:
A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
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