发明申请
- 专利标题: Film transistor and method for fabricating the same
- 专利标题(中): 薄膜晶体管及其制造方法
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申请号: US11540155申请日: 2006-09-29
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公开(公告)号: US20070210313A1公开(公告)日: 2007-09-13
- 发明人: Jae Bum Park
- 申请人: Jae Bum Park
- 专利权人: LG PHILIPS LCD CO., LTD.
- 当前专利权人: LG PHILIPS LCD CO., LTD.
- 优先权: KR10-2006-0022625 20060310
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L21/84
摘要:
A method for fabricating a thin film transistor and a thin film transistor includes a polycrystalline silicon layer formed by irradiating an amorphous silicon layer with a laser beam through an organic layer formed on the amorphous silicon layer and removing the organic layer.
公开/授权文献
- US07960295B2 Film transistor and method for fabricating the same 公开/授权日:2011-06-14
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