Invention Application
US20070210331A1 Guard ring applied to ion implantation equipment 审中-公开
防护环应用于离子注入设备

  • Patent Title: Guard ring applied to ion implantation equipment
  • Patent Title (中): 防护环应用于离子注入设备
  • Application No.: US11369828
    Application Date: 2006-03-08
  • Publication No.: US20070210331A1
    Publication Date: 2007-09-13
  • Inventor: Yu Chen
  • Applicant: Yu Chen
  • Main IPC: H01L31/00
  • IPC: H01L31/00
Guard ring applied to ion implantation equipment
Abstract:
A guard ring applied to an ion implantation equipment is disposed between a bushing and an ion beam source housing of the ion implantation equipment. The guard ring is made of high-density ceramic material. The guard ring can prevent arcing generated by the high voltage used for ion implantation from causing unpredicted damage to the bushing, thereby effectively protecting the ion implantation equipment, increasing the lifetime of use of the ion implantation equipment, and lengthening the maintenance cycle.
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