Invention Application
US20070224347A1 Liquid coating apparatus and method thereof 审中-公开
液体涂布装置及其方法

Liquid coating apparatus and method thereof
Abstract:
A liquid coating apparatus and method for spraying a liquid on a wafer. The liquid coating apparatus may include a nozzle unit spraying the liquid on the wafer and moving relative to the wafer and a laminar flow forming unit forming a forced air flow around the nozzle unit. Though a wake may be formed around the nozzle unit by a movement of the nozzle unit, the laminar forming unit may reduce and/or minimize an influence of the wake.
Information query
Patent Agency Ranking
0/0