发明申请
- 专利标题: Method of manufacturing MEMS device package
- 专利标题(中): 制造MEMS器件封装的方法
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申请号: US11802231申请日: 2007-05-21
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公开(公告)号: US20070224719A1公开(公告)日: 2007-09-27
- 发明人: Jong-seok Kim , Yun-kwon Park , In-sang Song , Duck-hwan Kim , Kuang-woo Nam , Seok-chul Yun
- 申请人: Jong-seok Kim , Yun-kwon Park , In-sang Song , Duck-hwan Kim , Kuang-woo Nam , Seok-chul Yun
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR2004-112700 20041227
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A micro electromechanical system (MEMS) device package and a method of manufacturing the same are provided. The MEMS device package includes: a device substrate with a MEMS active device being formed on the top surface thereof; internal electrode pads, each of which is positioned on the opposite side of the MEMS active device and electrically connected to the MEMS active device; sealing pads positioned outside of the internal electrode pads; a closure substrate joined to the device substrate through the sealing pads, the closure substrate having via holes formed at the areas where the internal electrode pads are positioned; and external electrode pads formed on the top surface of the closure substrate in such a way that the external electrode pads are electrically connected to the internal electrode pads through the via holes. The internal electrode pads and the sealing pads are formed from an identical material such as Au and thus the device substrate and the closure substrate are bonded to each other with direct bonding such as Au—Au direct bonding via the sealing pads.
公开/授权文献
- US07537952B2 Method of manufacturing MEMS device package 公开/授权日:2009-05-26
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