Invention Application
- Patent Title: Dielectric material having carborane derivatives
- Patent Title (中): 具有碳硼烷衍生物的介电材料
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Application No.: US11582720Application Date: 2006-10-17
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Publication No.: US20070224834A1Publication Date: 2007-09-27
- Inventor: Michael Haverty , Tim Chen , Sadasivan Shankar
- Applicant: Michael Haverty , Tim Chen , Sadasivan Shankar
- Main IPC: H01L21/31
- IPC: H01L21/31
Abstract:
Numerous embodiments of an apparatus and method of a dielectric material having a low dielectric constant and good mechanical strength are described. In one embodiment a dielectric material having multiple porous regions is disposed over a substrate. A caged structure is bridged within the plurality of pores. In one particular embodiment, the caged structure may be carborane or a carborane derivative.
Information query
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