发明申请
- 专利标题: Microstructured Chemical Sensor
- 专利标题(中): 微结构化学传感器
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申请号: US10565984申请日: 2004-07-23
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公开(公告)号: US20070234801A1公开(公告)日: 2007-10-11
- 发明人: Heribert Weber , Doris Schielein , Christian Krummel , Christoph Schelling
- 申请人: Heribert Weber , Doris Schielein , Christian Krummel , Christoph Schelling
- 优先权: DE10333996.5 20030725; DE10347414.3 20031013
- 国际申请: PCT/DE04/01647 WO 20040723
- 主分类号: G01N27/12
- IPC分类号: G01N27/12
摘要:
The invention relates to a sensor comprising a first metallization plane located on a substrate (1), a passivation layer (6) that is structured by contact holes (7) and is applied to said substrate and a sensitive ceramic layer (9) formed by thick-film technology on the passivation layer and in the contact holes (7). The aim of the invention is to improve the adhesion of the ceramic layer (9). To achieve this, the sensor is provided with an adhesion promoter layer (8) that is configured as a second metallization plane and is located between the passivation layer (6) and the ceramic layer (9).
公开/授权文献
- US07453254B2 Microstructured chemical sensor 公开/授权日:2008-11-18
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