发明申请
- 专利标题： Method of monitoring PCMO precursor synthesis
- 专利标题（中）： 监测PCMO前体合成的方法
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申请号： US11403022申请日： 2006-04-11
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公开(公告)号： US20070238203A1公开(公告)日： 2007-10-11
- 发明人: Wei-Wei Zhuang , David Evans , Tingkai Li , Sheng Hsu
- 申请人： Wei-Wei Zhuang , David Evans , Tingkai Li , Sheng Hsu
- 专利权人： Sharp Laboratories of America, Inc.
- 当前专利权人： Sharp Laboratories of America, Inc.
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
A method of monitoring synthesis of PCMO precursor solutions includes preparing a PCMO precursor solution and withdrawing samples of the precursor solution at intervals during a reaction phase of the PCMO precursor solution synthesis. The samples of the PCMO precursor solution are analyzed by UV spectroscopy to determine UV transmissivity of the samples of the PCMO precursor solution and the samples used to form PCMO thin films. Electrical characteristics of the PCMO thin films formed from the samples are determined to identify PCMO thin films having optimal electrical characteristics. The UV spectral characteristics of the PCMO precursor solutions are correlated with the PCMO thin films having optimal electrical characteristics. The UV spectral characteristics are used to monitor synthesis of future batches of the PCMO precursor solutions, which will result in PCMO thin films having optimal electrical characteristics.
公开/授权文献
- US07625595B2 Method of monitoring PCMO precursor synthesis 公开/授权日：2009-12-01
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