In a thin-film photovoltaic (TF PV) module, stacked cells provide efficient conversion of solar energy without being afflicted by conventional problems such as current matching between layers. According to one aspect, the module includes separate terminals for the respective layers in the stack, thus allowing the current in each layer to be different without sacrificing efficiencies gained due to their different bandgaps. According to another aspect of the invention, a processing method according to the invention includes forming interconnects for each layer using etch and deposition processing, including forming separate interconnects for each respective layer, which interconnects can be coupled to respective sets of terminals.